Micro Electronic and Mechanical Systems | PERPUSTAKAAN U.M.S.I.D.A

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Image of Micro Electronic and Mechanical Systems

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Micro Electronic and Mechanical Systems

Kenichi Takahata - Nama Orang;

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

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EB0002247

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Informasi Detail

Judul Seri: -
No. Panggil: -
Penerbit: Croatia : IntechOpen., 2009
Deskripsi Fisik: 526 hlm.
Bahasa: Inggris
ISBN/ISSN: 978-953-51-5847-9
Klasifikasi: NONE
Tipe Isi: -
Tipe Media: -
Tipe Pembawa: -
Edisi: -
Subjek: Electronics engineering
Info Detail Spesifik: -
Pernyataan Tanggungjawab: -

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Micro Electronic and Mechanical Systems

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